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Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of CH3F or CH2F2 and CF4 and O2

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  • Post etch photoresist and residue removal process

    Moreover, the time required to complete the ashing process for the CHF3 plasma composition was 60 seconds compared to 120 seconds for the CF4 process which did not result in complete removal of the post etch residues. An additional step that included a 20 second CF4 plasma process with the forming gas off did not remove

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  • US5786276A - Selective plasma etching of silicon nitride

    Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of CH3F or CH2F2 and CF4 and O2

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    2014-6-23gaseousdielectrics;gasmixtures;gasrecycling;globalwarming;nitrogen;SFg;SFg-Ngmixtures;sulfur. hexafluoride. Ordering CopiesofthisdocumentareavailablefromtheNationalTechnicalInformationService,5285PortRoyalRoad,

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  • Smoothing of the Si surface using CF4/O2 down‐flow

    2019-3-18Changes in surface morphology have been studied for Si surfaces treated with CF4/O2 down‐flow etching. It has been found that rough Si surfaces can be smoothed and Si trench corners can

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    Translate this page2016-8-6VICKERS AC BRUSHLESS SERVO CONTROLLER DRIVE BRM-4S-20 BRM-4S20 CF1155 4500RPM. VICKERS AC BRUSHLESS SERVO CONTROLLER DRIVE BRM-4S-20F BRM-4S20F CF1155 3000RPM. VICKERS AC SERVO CONTROL DRIVE BRM-4S-40 BRM-4S-40D BRM4S-4D CF1157 3000 RPM. VICKERS AC

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