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IR SF6 process for 110kv

IR SF6 process for 110kv

2021-1-27In this paper, parametric study of etching process for tapered TSV with SF6/C4F8/O-2 will be carried out in an STS ICP etching machine. Interactions between the process parameters and TSV profile will be studied and TSV profile development versus time will be modeled for offering guidance for TSV profile

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  • Title Parametric Study, Modeling of

    Translate this page2021-1-27In this paper, parametric study of etching process for tapered TSV with SF6/C4F8/O-2 will be carried out in an STS ICP etching machine. Interactions between the process parameters and TSV profile will be studied and TSV profile development versus time will be modeled for offering guidance for TSV profile

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