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2019-1-15:SF6、C4F8、O2、Ar : : :0512-67068000 : :025-85485967 0512-53835628

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  • KEPCO Develops SF6 Recycling Device to Combat

    Korea Electric Power Corp. (KEPCO) announced on July 9 that it has developed a sulfur hexafluoride (SF6) refining device which recycles SF6 emissions from discarded shutters and transformers.SF6 is a greenhouse gas whose global warming effects are 23,900 times those of carbon dioxide. SF6 is used as

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  • Status of SF6 separation/refining technology

    2018-7-12The service life of GIS, circuit breakers, and buses are about 22 years. When their service life is expired, they are preferentially subject to replacement. Currently KEPCO spurs the development of technologies to recover, separate, and refine SF 6 from the expired power facilities. There are various SF 6 refiningCited by: 9

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  • 南京顺泰科技有限公司

    Translate this page2019-10-29SF6/O2在线监测报警系统 发表时间:2019-10-29 阅读次数:4675 室内SF 6 气体、氧气在线监测报警系统,是针对变电站室内SF 6 组合电器设备SF 6 绝缘气体泄漏的在线式监测报警系统,主要应用在变电站内35kV SF 6 开关室,500kV、220kV、110kV GIS室,SF 6 实验室储存室以及其他安装SF 6 设备的室内环境的综合监测。

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  • Separation of sulfur hexafluoride (SF6) from ternary gas

    The separation of sulfur hexafluoride (SF 6), a powerful anthropogenic greenhouse gas, was investigated using membrane technology.Permeation measurements in commercial polysulfone (PSf) hollow fiber membranes were performed using single gases (i.e. N 2, O 2 and SF 6) to investigate the effect of temperature and

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  • A Kinetic Model for Plasma Etching Silicon in a SF6/O2 RF

    Abstract: Time-dependent Boltzmann electron distribution calculations have been made at constant power and pressure in a SF6/O2 plasma with a varying oxygen mole fraction. The results show that as the oxygen fraction increases in a SF6/O2 plasma, the number of high-energy electrons in the tail of the electron distribution and theCited by: 82

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  • Cheap Sf6 Detection System Honeywell

    750kv-substation-onsite-service. On-site SF6 recovery service is driven by a trailer which equipped with our full set of recovery, refilling, purification equipment and measuring instrument, drive to the substandard gas compartment, perform onsite shutdown and maintenance, directly recover unqualified SF6 gas, recycle and

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  • SF6 decomposition multicomponent analysis system,SF6

    SF6 decomposition multicomponent analysis system,SF6 gas testing products,Products in the world,Beijing el technology co., LTD,Product model: SF6 - FTIR - 401Origin: Germany1. The SF6 features:Sulfur hexafluoride (SF6) gas, by two French chemist Mois

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  • SL3000-在线SF6泄漏报警系统产品说明

    Translate this pagewenku.baidu.com›百度文库›说明书2014-4-22SL3000-在线SF6泄漏报警系统产品说明书(网络版)_电力/水利_工程科技_专业资料 215人阅读|45次下载 SL3000-在线SF6泄漏报警系统产品

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  • Plasma etching of Si and SiO2 in SF6–O2 mixtures:

    1998-6-4The products of reaction and etch rates of Si and SiO 2 in SF 6 ‐O 2 plasmas have been studied as a function of feedCited by: 330

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  • 南京顺泰科技有限公司

    Translate this page服务热线service line 真心寻找行业合作伙伴,为民族电力添砖加瓦! 联系人:15651612426 魏女士 SF6/O2 在线监测报警系统 高压设备紫外、红外在线监测系统 排水型电柜除湿器

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  • D-Industrial - SF6 gas leak detector

    1997-7-26D-Industrial Technology (Shanghai) Co., Ltd. is an enterprise specializing in the RD, manutacturing,sales and after-sales of SF6 gas leak detector, SF6 multigas analyzer and related supporting equipment.

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  • Study on Pyrolysis Characteristics of SF6

    Translate this page2020-10-21The ReaxFFSFO force field for a SF6–O2 system is developed based on the density functional theory (DFT) calculation data. Then, a series of molecular dynamics (MD) simulations were performed. The results show that the main oxygen

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  • SF6 gas Mixtures Decomposition for subway

    SF6 gas Mixtures Decomposition for subway. PD can cause decomposition of sf 6 gas, resulting in the production of various low-fluorine sulfides, such as SF 4, SF 3, SF 2, and S 2 F 10. 1 – 3 Because of the presence of trace impurities, such as H 2 O and O 2, in the equipment, these low-fluorine sulfides generate many more stable

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  • Cryogenic etching of silicon with SF6/O2/SiF4

    Cyrogenic etching of silicon is envisaged to enable better control over plasma processing in microelectronics and to limit plasma induced damage for features beyond the 14 nm technology node. We here present results of plasma modelling for a SF6/O2/SiF4 plasma and of molecular dynamics (MD) simulations for predicting

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  • ENTEC

    2021-3-16Entecs SF6 Gas Insulated Ring Main Unit is designed for application in underground lines for voltage classes of 17.5kV and 24kV. It consists of Load Break Switch(LBS) and Circuit Breaker(CB) or Fuse-switch modules, and this combination is variable depending on customers requirements.

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  • 武汉国电西高电气有限公司提供-电缆故

    Translate this page2021-3-12武汉国电西高电气有限公司系集电力检测设备、仪器仪表、电力在线监测系统的研发、生产与销售为一体的高科技企业。公司自成立10年以来,先后取得了《高新技术企业证书》、《ISO9001:2000质

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  • ICP等离子体刻蚀机(深硅) - 技联园区

    Translate this page2019-1-15刻蚀气体:SF6、C4F8、O2、Ar 可刻蚀材料包括:硅材料 建设单位: 苏州工业园区企业发展服务中心 咨询热线:0512-67068000 技术支持: 江苏省生产力促进中心 太仓中科信息技术研究院 咨询热线:025-85485967 0512-53835628

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  • NA1000MS SF6 Gas Leakage Monitoring

    Translate this pageTGAS-1013 SF6 Gas Leakage Monitor NA1000MS SF6 Gas Leakage Monitoring System ZA-3502 SF6 Gas Dew Point Meter RA-912F SF6 Gas Analyzer NA1100P SF6 Gas Density Meter SF6 Gas Handling Device/Service carts

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  • The etching of silicon carbide in inductively coupled SF6

    2003-2-14The etching mechanisms of silicon carbide in an inductively coupled plasma (ICP) reactor using a SF 6 / O 2 gas mixture, have been investigated using optical emission spectroscopy (OES) and Langmuir probe measurements. The etching is shown to be ion induced with a high degree of anisotropy.

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  • Dry_Etch_细化资料 - 豆丁网

    Translate this page2013-2-14用SF6 /O2/He Gas Condition 行刻蚀。 GI是SiNx的情况下,添加O2不 能稳定和SiNx的Selectivity。 这 种情况要添加HCL或Cl2控制选 RIEMode更多是利用ION或 Radical的方向性进行刻蚀而 不是等离子的化学反应,RIE Mode主要使用Cl2 Gas,因 此a-Si/SiNx Selectivity 制较易进行。

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  • High-temperature etching of SiC in SF6/O2 inductively

    2020-11-17Camara, N. Zekentes, K. Study of the reactive ion etching of 6H–SiC and 4H–SiC in SF6/Ar plasmas by optical emission spectroscopy and laser interferometry. Solid-State Electron. 46 , 1959Cited by: 1

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  • 武汉国电西高电气有限公司-无局放试验

    Translate this pageGDWS-311RC便携式阻容法SF6气体露点仪 GDC-9560C电力系统专用油色谱分析仪 GD8000B SF6-O2在线泄漏监控报警系统 GDLD-II SF6在线微水密度监测系统 GDCR3600 智能型等电位测试仪 GD2000D 绝缘电阻测试仪 GD2000系列 智能双显绝缘

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  • Zhuolu High Pressure Vessel Co., Ltd. - Seamless steel

    Zhuolu High Pressure Vessel Co., Ltd., Experts in Manufacturing and Exporting Seamless steel cylinder, Bladder accumulators and 547 more Products. A Verified CN Gold Supplier on Alibaba.com.

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  • products – Dilo China

    Translate this pageSF6 Service Cart 服务车的优势: 尽量减少废物处置成本,降低成本的新99.999% SF6 气体,运输费用减少,降低存储成本。制备的SF6气体纯度完全符合IEC 60480《SF6气体使用规范》。所获得的价值、湿度、SF6气体体积、分解产品(二氧化硫)远远低于IEC

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  • Low temperature etching of Si in high density plasma

    1995-2-1Low temperature etching of Si with SF 6 has been studied, using a DECR system and a special Helicon type plasma source. In contrast to the current understanding of low temperature etching, we did not observe a “freezing” of the lateral etching reaction, but obtained isotropic etch profiles, even at temperatures below −120& C. Anisotropic etch profiles are obtained by an addition of O 2.

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  • 反应离子腐蚀技术 - 头条百科

    Translate this page反应离子腐蚀技术是一种各向异性很强、选择性高的干法腐蚀技术。它是在真空系统中利用分子气体等离子来进行 刻蚀 的,利用了离子诱导化学反应来实现各向异性刻蚀,即是利用离子能量来使被刻蚀层的表面形成容易刻蚀的损伤层和促进化学反应,同时离子还可清除表面生成物以露出清洁的刻蚀

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  • 大气环境监测仪_空气质量检测仪_空气检

    Translate this page富凯特科技-专业研发生产:大气环境监测仪,空气质量检测仪,空气检测仪,无人机环境监测仪,PM2.5扬尘噪音监测系统,VOCS在线监测系统,环境检测,可燃气体报警器,室内空气质量检测仪,氮氧化物分析仪,气体传感器,气体报警器,气体检测仪,气杯式探头,是一家专业气体检测系统配套方案提供商。

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  • ENTEC

    2021-3-11Their cooperation in RD, production, quality management, sales, and technical services has been achieved Entec’s ongoing success. We are always open to meet the right people to grow together. As a global company, we have a variety of global networks operating to give solutions to the clients in the overseas markets.

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