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nh3 leakage and quality for abb

nh3 leakage and quality for abb

CiteSeerX - Document Details (Isaac Councill, Lee Giles, Pradeep Teregowda): Ultra-thin oxynitrides can serve as gate dielectrics for the technology nodes 100 nm and below. In this work, we present the properties of ultra-thin oxynitride gate dielectrics prepared by RTP nitridation of Si in NH3 followed by post-grown oxidation in O2 or

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    Get Price
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